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Specifications | Actuator | : Servo motor | Drive mechanism | : Lead screw | Speed control | : Available | Power input | : 230V, 50Hz | PC connectivity | : Serial port (RS 232) | Stroke length max. | : 150 mm | Drawing speed min. | : 18 micron/sec | Drawing speed max. | : 9000 micron/sec | Program memory | : 8 programs | Dimension | : 630 x 368 x 420 mm | Max. Power Consumption | : 600 watts | Max Temperature | : 200¡Æ Celsius | Max Substrate size | : 75 mm |
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